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Frederick Chen's avatar

At 22 nm pitch, TM polarization (perpendicular to plane of mirror incidence), doesn't degrade NILS too much but 5.7 mJ/cm2 absorbed EUV (60 mJ/cm2 through 20 nm resist) is ridiculously stochastic already. https://www.linkedin.com/posts/frederick-chen-7648bb7_22-nm-pitch-tm-polarization-perpendicular-activity-7277560314840207361-TiuG?utm_source=share&utm_medium=member_desktop

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