In the past few years, there has been a growing effort to predict the probability of the occurrence of EUV stochastic defects [1-8].
After posting, this paper by Samsung and ASML from 2025 came to my attention, confirming the same >ppm-level results that I reported: https://www.spiedigitallibrary.org/conference-proceedings-of-spie/13426/134261Z/The-sub-ppm-level-of-stochastic-failure-model-for-random/10.1117/12.3050663.short Also observed two orders of magnitude failure probability variation across patterns at nominal condition. Defects with sub-ppm level failure probability could contribute to yield loss.
Yep saw that article too. Thanks for pointing it out though. Cheers.
Again with the brains over brawn approach Fred. I was doing research on this very subject and whadayaknow....ol Fred Chen knows the real deal....Well done bud.
Thank you for sharing this wonderful insight.
After posting, this paper by Samsung and ASML from 2025 came to my attention, confirming the same >ppm-level results that I reported: https://www.spiedigitallibrary.org/conference-proceedings-of-spie/13426/134261Z/The-sub-ppm-level-of-stochastic-failure-model-for-random/10.1117/12.3050663.short Also observed two orders of magnitude failure probability variation across patterns at nominal condition. Defects with sub-ppm level failure probability could contribute to yield loss.
Yep saw that article too. Thanks for pointing it out though. Cheers.
Again with the brains over brawn approach Fred. I was doing research on this very subject and whadayaknow....ol Fred Chen knows the real deal....Well done bud.
Thank you for sharing this wonderful insight.