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Allen Rasafar's avatar

Thank you for sharing great pleasure to

follow and read your valuable posts.

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Frederick Chen's avatar

This video was motivated by the recent report [1] of stochastic CD nonuniformity driving EUV double patterning for 36 nm vias in order to avoid exorbitant doses: https://www.youtube.com/watch?v=CWrDaUvTxIE 36 nm vias indeed exhibit stochastic edge behavior at realistic doses.

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