Realistic doses are too low to treat EUV resist exposure classically like DUV
Electron noise dominates over EUV photon shot noise at higher doses: https://frederickchen.substack.com/p/how-secondary-electrons-worsen-euv
In this updated video presentation, 5 nm Gaussian acid blur smoothing is considered (rather than 2.5 nm): https://www.youtube.com/watch?v=Ogj1gz6kRrY
Electron noise dominates over EUV photon shot noise at higher doses: https://frederickchen.substack.com/p/how-secondary-electrons-worsen-euv
In this updated video presentation, 5 nm Gaussian acid blur smoothing is considered (rather than 2.5 nm): https://www.youtube.com/watch?v=Ogj1gz6kRrY