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Frederick Chen's avatar

Electron noise dominates over EUV photon shot noise at higher doses: https://frederickchen.substack.com/p/how-secondary-electrons-worsen-euv

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Frederick Chen's avatar

In this updated video presentation, 5 nm Gaussian acid blur smoothing is considered (rather than 2.5 nm): https://www.youtube.com/watch?v=Ogj1gz6kRrY

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